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1. Microlithography : process technology for IC fabrication

by Elliott, David J.

Material type: book Book; Format: print ; Literary form: not fiction Publisher: New York : McGraw-Hill, c1986Availability: Items available for loan: Dhaka University Science Library [621.38173 ELM] (1).

2. Handbook of microlithography, micromachining, and microfabrication

by Rai-Choudhury, P.

Material type: book Book; Format: print ; Literary form: not fiction Publisher: Bellingham, Wash., USA : London, UK : SPIE Optical Engineering Press ; Institution of Electrical Engineers, c1997Other title: Microlithography, micromachining, and microfabrication.Availability: Items available for loan: Dhaka University Science Library [670 476144] (1).

3. Semiconductor lithography : principles, practices, and materials

by Moreau, Wayne M.

Material type: book Book; Format: print ; Literary form: not fiction Publisher: New York : Plenum Press, c1988Availability: Items available for loan: Dhaka University Science Library [621.38152 MOS] (1).

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