Microlithography : process technology for IC fabrication /
by Elliott, David J.
Material type:
BookPublisher: New York : McGraw-Hill, c1986Description: xix, 378 p. : ill. ; 24 cm.ISBN: 0070193045 :.Subject(s): Integrated circuits -- Very large scale integration -- Design and construction | Microlithography | Photoresists
| Item type | Current location | Collection | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
Books
|
Dhaka University Science Library General Stacks | Non Fiction | 621.38173 ELM (Browse shelf) | Available | 314846 |
Includes bibliographies and index.
There are no comments for this item.