000			01389cam a22003137a 4500
001			16182223
003			BD-DhUL
005			20151102093613.0
008			100412s2010 maua b 001 0 eng d
010			_a 2010278239
020			_a9781607839774
020			_a1607839776
035			_a(OCoLC)ocn557312553
040			_aITD _cITD _dBWX _dYDXCP _dCDX _dWAU _dCOD _dBTCTA _dVRC _dDLC _dBD-DhUL
042			_alccopycat
050	0	0	_aTK5981 _b.C347 2010
082	0	0	_a621.3815 _223 _bCAA
100	1		_aCampanella, Humberto.
245	1	0	_aAcoustic wave and electromechanical resonators : _bconcept to key applications / _cHumberto Campanella.
246	3		_aAcoustic wave & electromechanical resonators
260			_aNorwood, MA. : _bArtech House, _cc2010.
300			_axv, 345 p. : _bill. ; _c26 cm.
490	1		_aIntegrated microsystems series
504			_aIncludes bibliographical references and index.
505	0		_a1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.
650		0	_aAcoustic surface wave devices.
650		0	_aElectric resonators.
942			_2ddc _cBK
999			_c42507 _d42507