| 000 | 01094cam a22003378a 4500 | ||
|---|---|---|---|
| 001 | 648974 | ||
| 003 | BD-DhUL | ||
| 005 | 20150118160057.0 | ||
| 008 | 880105s1987 gw a b 001 0 eng | ||
| 010 | _a 87020660 | ||
| 020 | _a0387179518 (U.S.) | ||
| 035 | _a(OCoLC)16404257 | ||
| 035 | _a(OCoLC)ocm16404257 | ||
| 035 | _a(CStRLIN)NYCG88-B345 | ||
| 035 | _a(NNC)648974 | ||
| 040 |
_dNIC _dBD-DhUL _cBD-DhUL |
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| 050 | 0 |
_aTA1677 _b.B69 1987 |
|
| 082 | 0 |
_a621.366 _bBOL |
|
| 090 |
_aTA1677 _b.B69 1987 |
||
| 100 | 1 |
_aBoyd, Ian W., _d1958- |
|
| 245 | 1 | 0 |
_aLaser processing of thin films and microstructures : _cIan W. Boyd. _boxidation, deposition, and etching of insulators / |
| 260 |
_aBerlin ; _aNew York : _bSpringer-Verlag, _cc1987. |
||
| 300 |
_aviii, 320 p. : _bill. ; _c24 cm. |
||
| 365 |
_aUS$ _b68.60 |
||
| 490 | 1 |
_aSpringer series in materials science ; _v3 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aLasers _xIndustrial applications. |
|
| 830 | 0 |
_aSpringer series in materials science ; _vvol. 3. |
|
| 900 | _aAUTH | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c32909 _d32909 |
||