000			02192cam a2200433 a 4500
001			2101836
003			BD-DhUL
005			20150115144602.0
008			950907s1995 enka bf 001 0 eng d
010			_a 95237129 _z 96119879
020			_a0750303115
020			_a0750305290 (98/2 suppl.)
035			_a(OCoLC)33093216
040			_aUkNcU _cUkNcU _dViBlbV _dDLC _dBD-DhUL
042			_alccopycat
050	0	0	_aTA418.9.T45 _bH36 1995
051			_aTA418.9.T45 _bH36 1995 Suppl. 98/1
051			_aTA418.9.T45 _bH36 1995 Suppl. 98/2
082	0	0	_a621.38152 _bHAN
245	0	0	_aHandbook of thin film process technology / _ced. by David A. Glocker and S. Ismat Shah.
246	3		_aThin film process technology
260			_aBristol, UK ; _aPhiladelphia : _bInstitute of Physics, _cc1995.
300			_axvii, 1 v. (various pagings) : _bill. ; _c31 cm.
365			_aGBP _b300
500			_aAccompanied by: Supplement 98/1, Reactive sputtering / guest editor, William D. Westwood (1 v. (various pagings) : ill. ; 30 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/1
500			_aAccompanied by : Supplement 98/2, Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah (1 v. (various pagings) : ill. ; 31 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/2
504			_aIncludes bibliographical references and indexes.
650		0	_aThin films _vHandbooks, manuals, etc.
650		0	_aSurfaces (Technology) _vHandbooks, manuals, etc.
700	1		_aGlocker, David A.
700	1		_aShah, S. Ismat.
700	1		_aWestwood, William D. _q(William Dickson), _d1937-
730	0		_a98/1 Reactive sputtering.
730	0		_a98/2 Recipes for optical materials.
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0713/95237129-d.html
906			_a7 _bcbc _ccopycat _d2 _encip _f19 _gy-gencatlg
942			_2ddc _cBK
955			_apb20 12-26-95 to cat.; jf00 12-27-95; jf06 to subj 01-17-96; jf08 01-17-96 to SL;jf12 1-31-96; supp. added jf03 07-08-99 _cjf09 2007-04-25 98/2, suppl added _cjf07 2008-01-09 supplements recat. separately
999			_c31670 _d31670