| 000 | 01359cam a2200337 a 4500 | ||
|---|---|---|---|
| 001 | 3054225 | ||
| 003 | BD-DhUL | ||
| 005 | 20150115144445.0 | ||
| 008 | 961204m19971997waua b 001 0 eng | ||
| 010 | _a 96040237 | ||
| 020 | _a0819423785 (v. 1) | ||
| 020 | _a0819423793 (v. 2) | ||
| 040 |
_aDLC _cDLC _dDLC _dBD-DhUL |
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| 050 | 0 | 0 |
_aTK7836 _b.H3423 1997 |
| 082 | 0 | 0 |
_a670 _221 _b476144 |
| 245 | 0 | 0 |
_aHandbook of microlithography, micromachining, and microfabrication / _cP. Rai-Choudhury, editor. |
| 246 | 3 | 0 | _aMicrolithography, micromachining, and microfabrication |
| 260 |
_aBellingham, Wash., USA : _bSPIE Optical Engineering Press ; _aLondon, UK : _bInstitution of Electrical Engineers, _cc1997. |
||
| 300 |
_a2 v. : _bill. ; _c26 cm. |
||
| 490 | 1 |
_aIEE materials and devices series ; _v12A-12B |
|
| 504 | _aIncludes bibliographical references and indexes. | ||
| 505 | 0 | _av. 1. Microlithography -- v. 2. Micromachining and microfabrication. | |
| 650 | 0 | _aMicrolithography. | |
| 650 | 0 | _aMicromachining. | |
| 650 | 0 | _aMicrofabrication. | |
| 700 | 2 | _aRai-Choudhury, P. | |
| 830 | 0 |
_aIEE materials & devices series ; _v12A-12B. |
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| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 955 | _apc03 to ja00 12-04-96; JG04 12-09-96; jg12 to tech1; jg11 to jg12; jg12 12-11-96; jg08 12-19-96; CIP ver. pv07 05-19-97 | ||
| 999 |
_c31665 _d31665 |
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