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| 001 | 1507916 | ||
| 003 | BD-DhUL | ||
| 005 | 20150115144127.0 | ||
| 008 | 890511s1990 nyua b 001 0 eng | ||
| 010 | _a 89012114 | ||
| 020 |
_a0070370567 : _c$46.95 |
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| 040 |
_aDLC _cDLC _dDLC _dBD-DhUL |
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| 050 | 0 | 0 |
_aTK7874 _b.L34 1990 |
| 082 | 0 | 0 |
_a621.3815 _220 _bLEF |
| 100 | 1 | _aLee, Hong H. | |
| 245 | 1 | 0 |
_aFundamentals of microelectronics processing / _cHong H. Lee. |
| 260 |
_aNew York : _bMcGraw-Hill, _cc1990. |
||
| 300 |
_axvi, 514 p. : _bill. ; _c25 cm. |
||
| 365 |
_aUS$ _b11.50 |
||
| 440 | 0 | _aMcGraw-Hill chemical engineering series | |
| 504 | _aIncludes bibliographies and index. | ||
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 650 | 0 |
_aIntegrated circuits _xMaterials. |
|
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 955 | _aCIP ver. bh58 12-01-89 to SL 12-04-89 | ||
| 999 |
_c31662 _d31662 |
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