000 00899cam a2200313 a 4500
001 813155
003 BD-DhUL
005 20150115124436.0
008 900206s1989 nyua b 001 0 eng
010 _a 88032022
020 _a0070193398
035 _a(OCoLC)18714879
035 _a(OCoLC)ocm18714879
035 _a(CStRLIN)NYCG90-B8480
035 _a(NNC)813155
040 _dNBuU
_dBD-DhUL
_cBD-DhUL
050 0 _aTK7874
_b.E49 1989
082 0 _a621.38173
_219
_bELI
090 _aTK7874
_b.E49 1989
100 1 _aElliott, David J.
245 1 0 _aIntegrated circuit fabrication technology /
_cDavid J. Elliott.
250 _a2nd ed.
260 _aNew York :
_bMcGraw-Hill,
_cc1989.
300 _axvi, 540 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references.
650 0 _aIntegrated circuits
_xDesign and construction.
900 _aAUTH
942 _2ddc
_cBK
999 _c31577
_d31577