000 03028cam a2200721Ii 4500
001 ocn908335689
003 OCoLC
005 20171025075516.0
006 m o d
007 cr cnu|||unuuu
008 150504s2015 gw a ob 001 0 eng d
020 _a9783527676361
_qelectronic bk.
020 _a3527676368
_qelectronic bk.
020 _a9783527676354
_qelectronic bk.
020 _a352767635X
_qelectronic bk.
020 _a9783527676347
_qelectronic bk.
020 _a3527676341
_qelectronic bk.
020 _a9783527676330
_qelectronic bk.
020 _a3527676333
_qelectronic bk.
020 _z9783527335459
020 _a3527335455
020 _a9783527335459
029 1 _aAU@
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029 1 _aGBVCP
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029 1 _aAU@
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029 1 _aDEBBG
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035 _a(OCoLC)908335689
_z(OCoLC)961627051
_z(OCoLC)962626856
040 _aN$T
_beng
_erda
_epn
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049 _aMAIN
050 4 _aTK7875
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072 7 _aTEC
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072 7 _aTEC
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082 0 4 _a621.381
_223
245 0 0 _aResonant MEMS : fundamentals, implementation and application /
_cedited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse.
_h[electronic resource]
260 _aWiesbaden :
_bWiley-VCH Verlag & Co. KGaA,
_c[2015]
300 _a1 online resource :
_billustrations.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
490 1 _aAdvanced micro and nanosystems
504 _aIncludes bibliographical references and index.
588 0 _aOnline resource; title from PDF title page (Ebsco, viewed May 11, 2015).
650 0 _aMicroelectromechanical systems
_xDesign and construction.
650 0 _aMicrofabrication.
650 0 _aResonance.
650 7 _aTECHNOLOGY & ENGINEERING / Electronics / Digital
_2bisacsh
650 7 _aTECHNOLOGY & ENGINEERING / Electronics / General
_2bisacsh
650 7 _aTECHNOLOGY & ENGINEERING / Electronics / Microelectronics
_2bisacsh
650 7 _aMicroelectromechanical systems
_xDesign and construction.
_2fast
_0(OCoLC)fst01019747
650 7 _aMicrofabrication.
_2fast
_0(OCoLC)fst01019807
650 7 _aResonance.
_2fast
_0(OCoLC)fst01095610
655 4 _aElectronic books.
655 0 _aElectronic books.
700 1 _aBrand, Oliver,
_d1964-
_eeditor.
700 1 _aDufour, Isabelle
_c(Electrical engineer),
_eeditor.
700 1 _aHeinrich, Stephen M.,
_eeditor.
700 1 _aJosse, Fabien,
_eeditor.
776 0 8 _iPrint version:
_tResonant MEMS : fundamentals, implementation and application.
_dWeinheim, Baden-Württemberg, Germany : Wiley-VCH, c2015
_hxxv, 483 pages
_kAdvanced micro & nanosystems.
_z9783527335459
830 0 _aAdvanced micro & nanosystems.
856 4 0 _uhttp://onlinelibrary.wiley.com/book/10.1002/9783527676330
_zWiley Online Library
942 _2ddc
_cBK
999 _c208021
_d208021