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	1.		System-level modeling of MEMS / [electronic resource] by Bechtold, T. (Tamara); Schrag, Gabriele; Feng, Lihong. Material type: Book; Format: available online ; Literary form: not fiction Publisher: Weinheim : Wiley-VCH, ©2013Online Access: Wiley Online Library Availability: No items available Add to cart (remove)
	2.		Resonant MEMS : fundamentals, implementation and application / [electronic resource] by Brand, Oliver; Dufour, Isabelle (Electrical engineer); Heinrich, Stephen M; Josse, Fabien. Material type: Book; Format: available online ; Literary form: not fiction Publisher: Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]Online Access: Wiley Online Library Availability: No items available Add to cart (remove)

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