TY  - BOOK
AU  - Campanella, Humberto.
TI  - Acoustic wave and electromechanical resonators: concept to key applications 
T2  - Integrated microsystems series
SN  - 9781607839
AV  - TK5981 .C347 2010
U1  - 621.3815 23
PY  - 2010///
CY  - Norwood, MA.
PB  - Artech House
KW  - Acoustic surface wave devices
KW  - Electric resonators
N1  - Includes bibliographical references and index; 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies
ER  -