Acoustic wave and electromechanical resonators
concept to key applications
Acoustic wave & electromechanical resonators
Campanella, Humberto.
creator
text
bibliography
mau
Norwood, MA
Artech House
c2010
2010
monographic
eng
xv, 345 p. : ill. ; 26 cm.
1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.
Humberto Campanella.
Includes bibliographical references and index.
Acoustic surface wave devices
Electric resonators
TK5981 .C347 2010
621.3815 CAA
9781607839774
1607839776
2010278239
ITD
100412
20151102093613.0
16182223