01389cam a22003137a 4500 16182223 BD-DhUL 20151102093613.0 100412s2010 maua b 001 0 eng d 2010278239 9781607839774 1607839776 (OCoLC)ocn557312553 ITD ITD BWX YDXCP CDX WAU COD BTCTA VRC DLC BD-DhUL lccopycat TK5981 .C347 2010 621.3815 23 CAA Campanella, Humberto. Acoustic wave and electromechanical resonators : concept to key applications / Humberto Campanella. Acoustic wave & electromechanical resonators Norwood, MA. : Artech House, c2010. xv, 345 p. : ill. ; 26 cm. Integrated microsystems series Includes bibliographical references and index. 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies. Acoustic surface wave devices. Electric resonators. ddc BK 42507 42507 0 0 ddc 0 621_381500000000000_CAA 0 NFIC 69014 DUSL DUSL GEN 2015-08-06 Gift 621.3815 CAA 467781 2015-11-02 1 2015-11-02 BK