Acoustic wave and electromechanical resonators : concept to key applications - Campanella, Humberto (Norwood, MA. : Artech House, 2010)
1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.
Includes bibliographical references and index.
Keywords: Acoustic surface wave devices; Electric resonators