TY  - BOOK
AU  - Osten, Wolfgang.
AU  - Reingand, Nadya.
TI  - Optical imaging and metrology: advanced technologies 
SN  - 9783527410
U1  - 621.3675 23
PY  - 2012///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Optical engineering
KW  - Metrology
N1  - Includes bibliographic references and index
ER  -