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  <titleInfo>
    <title>Optical imaging and metrology</title>
    <subTitle>advanced technologies</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>Osten, Wolfgang.</namePart>
  </name>
  <name type="personal">
    <namePart>Reingand, Nadya.</namePart>
  </name>
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  <genre authority="marc">bibliography</genre>
  <originInfo>
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    <place>
      <placeTerm type="text">Weinheim</placeTerm>
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    <publisher>Wiley-VCH</publisher>
    <dateIssued>2012</dateIssued>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xxi, 482 p. : ill. (some col.) ; 25 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">edited by Wolfgang Osten, Nadya Reingand.</note>
  <note>Includes bibliographic references and index.</note>
  <subject authority="lcsh">
    <topic>Optical engineering</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Metrology</topic>
  </subject>
  <classification authority="ddc" edition="23">621.3675 OPT</classification>
  <identifier type="isbn">9783527410644</identifier>
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