Optical imaging and metrology : advanced technologies / edited by Wolfgang Osten, Nadya Reingand. Osten, Wolfgang. Reingand, Nadya. Optical engineering. Metrology. 621.3675 23 OPT Includes bibliographic references and index. Weinheim : Wiley-VCH, 2012. 2012. 2012 Text xxi, 482 p. : eng