01201cam a22003254a 4500 13118990 BD-DhUL 20150118185414.0 030311s2003 gw a b 001 0 eng 2003045497 354000856X (alk. paper) BD-DhUL BD-DhUL DLC pcc T174.7 .F85 2003 620.5 21 FUM Fujita, H Micromachines as tools for nanotechnology / H. Fujita (ed.) Berlin ; New York : Springer, 2003. xii, 211 : ill. ; 24 cm. Microtechnology and MEMS Includes bibliographical references. Nanotechnology. Microelectromechanical systems. Fujita, Hiroyuki, 1952- Publisher description http://www.loc.gov/catdir/enhancements/fy0813/2003045497-d.html Table of contents only http://www.loc.gov/catdir/enhancements/fy0813/2003045497-t.html 7 cbc orignew 1 ocip 20 y-gencatlg ddc BK pc17 2003-03-11 to ASCD jf05 2003-03-12 to subj. aa07 2003-03-13 ps10 2003-08-18 1 copy rec'd., to CIP ver. 33055 33055 0 0 ddc 0 620_500000000000000_FUM 0 NFIC 61916 DUSL DUSL GEN 2015-01-18 purchased 620.5 FUM 423870 2015-01-18 2 2015-01-18 BK 0 0 ddc 0 620_500000000000000_FUM 0 NFIC 61920 DUSL DUSL GEN 2015-01-18 purchased 620.5 FUM 423869 2015-01-18 1 2015-01-18 BK