01033cam a22003014a 4500 16786538 BD-DhUL 20210624104858.0 110519s2012 flua b 001 0 eng 2011014406 2011014404 2011014405 9781420055115 (hbk) (OCoLC)ocn727047810 DLC DLC YDX YDXCP CDX COO MYPMP DLC BD-DhUL pcc TK7875 .M33 2012 620.5 MAF 23 TEC027000 TEC008070 SCI077000 bisacsh Madou, Marc J. Fundamentals of microfabrication and nanotechnology : Vol. 1 : Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou. 3rd ed. Boca Raton : CRC Press, 2012. v. : ill. (some col.) ; 29 cm. USD 95.04 GBP 235.00 Includes bibliographical references and index. Nanotechnology. ddc BK 33024 33024 0 0 ddc 0 620_500000000000000_MAF 0 NFIC 61864 DUSL DUSL GEN 2012-12-10 Purchased 620.5 MAF 477243 2015-01-18 1 2015-01-18 BK 0 0 ddc 0 620_500000000000000_MAF 0 NFIC 387897 DUSL DUSL GEN 2020-02-09 Purchased 620.5 MAF 518741 2021-06-24 2 2021-06-24 BK Physics 0 0 ddc 0 620_500000000000000_MAF 0 NFIC 387898 DUSL DUSL GEN 2020-02-09 Purchased 620.5 MAF 518744 2021-06-24 3 2021-06-24 BK tr. to Physics dept.