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  <titleInfo>
    <title>Energy beam-solid interactions and transient thermal processing</title>
    <subTitle>symposium held November 1983 in Boston, Massachusetts, U.S.A</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>Fan, John C. C.</namePart>
  </name>
  <name type="personal">
    <namePart>Johnson, Noble M.</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <genre authority="marc">conference publication</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">nyu</placeTerm>
    </place>
    <place>
      <placeTerm type="text">New York</placeTerm>
    </place>
    <publisher>North-Holland</publisher>
    <dateIssued>c1984</dateIssued>
    <dateIssued encoding="marc">1984</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xviii, 791 p. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">editors, John C.C. Fan, Noble M. Johnson.</note>
  <note>Includes bibliographical references and indexes.</note>
  <subject authority="lcsh">
    <topic>Materials</topic>
    <topic>Effect of radiation on</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Effect of radiation on</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Semiconductor industry</topic>
    <topic>Laser use in</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Annealing of crystals</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Integrated circuits</topic>
    <topic>Congresses</topic>
  </subject>
  <classification authority="lcc">TA418.6 .E54 1984</classification>
  <classification authority="ddc">620.1228 S989</classification>
  <relatedItem type="series">
    <titleInfo>
      <title>Materials Research Society symposia proceedings, v. 23</title>
    </titleInfo>
  </relatedItem>
  <identifier type="isbn">0444009035</identifier>
  <identifier type="lccn">84010244</identifier>
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