@book{32593,
	author = {Sugioka, Kōji.},
	title = {Laser precision microfabrication /},
	publisher = {Springer,},
	year = {c2010.},
	series = {Springer series in materials science ;},
	address = {Berlin :},
	url = {http://www.loc.gov/catdir/enhancements/fy1316/2010931868-b.html}
}