Fundamentals of silicon integrated device technology : vol. 1, Oxidation, diffusion, and epitaxy - Burger, R. M. (Robert M.), 1927-; Donovan, R. P (Englewood Cliffs, N.J. : Printice-Hall, 1967)
v. 1 Oxidation, diffusion, and epitaxy. v. 2. Bipolar and unipolar transistors.
Includes bibliographical references and index.
Keywords: Microelectronics; Silicon