TY  - BOOK
AU  - Osgood, R. M.
AU  - Brueck, S. R. J.
AU  - Schlossberg, H. R.
ED  - United States.
TI  - Laser diagnostics and photochemical processing for semiconductor devices: symposium held November 1982 in Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposia proceedings
SN  - 0444007822
AV  - TA1673 .L355 1983
U1  - 621.3815 
PY  - 1983///
CY  - New York
PB  - North-Holland
KW  - Lasers
KW  - Industrial applications
KW  - Congresses
KW  - Semiconductors
N1  - "Sponsored by the Air Force Office of Scientific Research"--T.p. verso; Includes bibliographical references and indexes
ER  -