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  <titleInfo>
    <title>Laser diagnostics and photochemical processing for semiconductor devices</title>
    <subTitle>symposium held November 1982 in Boston, Massachusetts, U.S.A</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>Osgood, R. M.</namePart>
  </name>
  <name type="personal">
    <namePart>Brueck, S. R. J.</namePart>
  </name>
  <name type="personal">
    <namePart>Schlossberg, H. R.</namePart>
  </name>
  <name type="corporate">
    <namePart>United States</namePart>
    <namePart>Air Force.</namePart>
    <namePart>Office of Scientific Research.</namePart>
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  <genre authority="marc">bibliography</genre>
  <genre authority="marc">conference publication</genre>
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    <place>
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    <place>
      <placeTerm type="text">New York</placeTerm>
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    <publisher>North-Holland</publisher>
    <dateIssued>c1983</dateIssued>
    <dateIssued encoding="marc">1983</dateIssued>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xiii, 298 p. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.</note>
  <note>"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.</note>
  <note>Includes bibliographical references and indexes.</note>
  <subject authority="lcsh">
    <topic>Lasers</topic>
    <topic>Industrial applications</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Congresses</topic>
  </subject>
  <classification authority="lcc">TA1673 .L355 1983</classification>
  <classification authority="ddc">621.3815 OSL</classification>
  <relatedItem type="series">
    <titleInfo>
      <title>Materials Research Society symposia proceedings ; v. 17</title>
    </titleInfo>
  </relatedItem>
  <identifier type="isbn">0444007822 :</identifier>
  <identifier type="lccn">83008028</identifier>
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