@book{32115,
	author = {Osgood, R. M. and United States.},
	title = {Laser diagnostics and photochemical processing for semiconductor devices :},
	publisher = {North-Holland,},
	year = {c1983.},
	series = {Materials Research Society symposia proceedings ;},
	address = {New York :},
	note = {"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.}
}