TY  - BOOK
AU  -  
AU  - S. M. Sze.
TI  - ULSI technology / 
T2  - McGraw-hill series in electrical and computer engineering
U1  - 621.381 
PY  - 1996///
CY  - New York
PB  - McGraw-hill
KW  - Semiconductors
N1  - includes bibliographical references and index
ER  -