Surfaces, interfaces, and thin films for microelectronics / Eugene A. Irene. Irene, Eugene A. Surface chemistry. Interfaces (Physical sciences) Thin films. Microelectronics Materials. QD506 .I74 2008 621.381 22 IRS Includes bibliographical references and index. Hoboken, N.J. : Wiley-Interscience, c2008. c2008. 2008 Text xiii, 515 p. : http://www.loc.gov/catdir/toc/ecip0720/2007024692.html http://www.loc.gov/catdir/enhancements/fy0741/2007024692-d.html http://www.loc.gov/catdir/enhancements/fy0806/2007024692-b.html eng