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  <titleInfo>
    <title>Integrated circuit technology</title>
    <subTitle>instrumentation and techniques, for measurement, process and failure analysis</subTitle>
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  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <originInfo>
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    <place>
      <placeTerm type="text">New York</placeTerm>
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    <publisher>McGraw-Hill</publisher>
    <dateIssued>1967</dateIssued>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xv, 340 p. : ill. ; 26 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">ed. by Seymour Schwartz</note>
  <note>includes index.</note>
  <note>Includes bibliographies.</note>
  <subject authority="lcsh">
    <topic>Integrated circuits</topic>
  </subject>
  <classification authority="lcc">TK7874 .S3</classification>
  <classification authority="ddc">621.3815 SCI</classification>
  <identifier type="lccn">66028633</identifier>
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