TY  - BOOK
AU  - Zant, Peter Van.
TI  - Microchip fabrication: a practical guide to semiconductor processing 
SN  - 0071356363
AV  - TK7871.85 .V36 2000
U1  - 621.38152 
PY  - 2000///
CY  - New York
PB  - McGraw-Hill
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
N1  - Includes bibliographical references and index
ER  -