TY  - BOOK
AU  - Wilson, Robert G.
AU  - Brewer, George Raymond,
TI  - Ion beams; with applications to ion implantation
SN  - 0471950009
AV  - TK7871.85 .W54
U1  - 621.3815 
PY  - 1973///]
CY  - New York
PB  - Wiley
KW  - Ion implantation
KW  - Ion bombardment
N1  - "A Wiley-Interscience publication."; Includes bibliographies
ER  -