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  <titleInfo>
    <title>Ion beams; with applications to ion implantation</title>
  </titleInfo>
  <name type="personal">
    <namePart>Wilson, Robert G.</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Brewer, George Raymond</namePart>
    <namePart type="date">1922-</namePart>
    <role>
      <roleTerm type="text">joint author.</roleTerm>
    </role>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">nyu</placeTerm>
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    <place>
      <placeTerm type="text">New York</placeTerm>
    </place>
    <publisher>Wiley</publisher>
    <dateIssued>[1973]</dateIssued>
    <dateIssued encoding="marc">1973</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xii, 500 p. : illus. 23 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">Robert G. Wilson [and] George R. Brewer.</note>
  <note>"A Wiley-Interscience publication."</note>
  <note>Includes bibliographies.</note>
  <subject authority="lcsh">
    <topic>Ion implantation</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Ion bombardment</topic>
  </subject>
  <classification authority="lcc">TK7871.85 .W54</classification>
  <classification authority="ddc">621.3815 WII</classification>
  <identifier type="isbn">0471950009</identifier>
  <identifier type="lccn">72010383</identifier>
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    <recordCreationDate encoding="marc">721013</recordCreationDate>
    <recordChangeDate encoding="iso8601">20150115152809.0</recordChangeDate>
    <recordIdentifier source="BD-DhUL">4078272</recordIdentifier>
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