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  <titleInfo>
    <title>Semiconductors for micro- and nanotechnology</title>
    <subTitle>an introduction for engineers</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>Korvink, J. G. (Jan G.)</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
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  <name type="personal">
    <namePart>Greiner, Andreas.</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <originInfo>
    <place>
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    <place>
      <placeTerm type="text">Weinheim</placeTerm>
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    <publisher>Wiley-VCH</publisher>
    <dateIssued>c2002</dateIssued>
    <dateIssued encoding="marc">2002</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>340 p. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">Jan G. Korvink and Andreas Greiner.</note>
  <note>Includes bibliographical references and index.</note>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Textbooks</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Nanotechnology</topic>
    <topic>Mathematics</topic>
    <topic>Textbooks</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Microtechnology</topic>
    <topic>Mathematics</topic>
    <topic>Textbooks</topic>
  </subject>
  <classification authority="lcc">QC611 .K75 2002</classification>
  <classification authority="ddc" edition="21">621.38152 KOS</classification>
  <identifier type="isbn">3527302573</identifier>
  <identifier type="lccn">2002512459</identifier>
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    <recordCreationDate encoding="marc">020919</recordCreationDate>
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