@book{31703,
	author = {Korvink, J. G. and Greiner, Andreas.},
	title = {Semiconductors for micro- and nanotechnology :},
	publisher = {Wiley-VCH,},
	year = {c2002.},
	address = {Weinheim :},
	url = {http://www.loc.gov/catdir/description/wiley0310/2002512459.html}
}