01092cam a22003014a 4500 15904147 BD-DhUL 20150115145618.0 090914s2010 waua b 001 0 eng 2009036266 9780819475626 (SPIE) 9781118030028 (Wiley) DLC eng DLC DLC TP156.E68 O44 2010 621.381531 22 OKC Okoroanyanwu, Uzodinma. Chemistry and lithography / Uzodinma Okoroanyanwu. Hoboken, N.J. : Wiley ; Bellingham, Wash., USA : SPIE Press, c2010. xxix, 861 p. : ill. ; 26 cm. Includes bibliographical references and index. Lithography. Chemistry, Technical. Semiconductors Etching. Society of Photo-optical Instrumentation Engineers. 7 cbc orignew 1 ecip 20 y-gencatlg ddc BK rc15 2009-09-14 rc15 2009-09-14 to Dewey xd13 2010-05-17 changed PPD per publisher xe09 2011-07-02 bk rec'd, to CIP ver. 31687 31687 0 0 ddc 0 621_381531000000000_OKC 0 NFIC 59710 DUSL DUSL GEN 2012-01-15 Purchased 621.381531 OKC 475397 2015-01-15 2015-01-15 BK