Chemistry and lithography / Uzodinma Okoroanyanwu. Okoroanyanwu, Uzodinma. Society of Photo-optical Instrumentation Engineers. Lithography. Chemistry, Technical. Semiconductors Etching. TP156.E68 O44 2010 621.381531 22 OKC Includes bibliographical references and index. Hoboken, N.J. : Wiley ; Bellingham, Wash., USA : SPIE Press, c2010. c2010. 2010 Text xxix, 861 p. : eng