01039cam a22002894a 4500 12011965 BD-DhUL 20150115145034.0 000518s2001 njua b 001 0 eng 00041653 0130815209 DLC DLC DLC BD-DhUL pcc TK7836 .Q27 2001 621.38152 QUS Quirk, Michael. 1953- Semiconductor manufacturing technology / Michael Quirk and Julian Serda. Upper Saddle River, NJ : Prentice Hall, c2001. xiii, 666 p. : ill. ; 29 cm. Includes bibliographical references (p. 647) and index. Electronic industries. Semiconductors Design and construction. Serda, Julian. 7 cbc orignew 1 ocip 20 y-gencatlg ddc BK to ASCD pc16 05-18-00; jf09 (desc) 5-18-2000; jf08 05-19-00 to SL; jf12 to Dewey 05-24-00; aa07 05-30-00 jf01 2001-08-22 copy 2 added to BCCD 31678 31678 0 0 ddc 0 621_381520000000000_QUS 0 NFIC 59702 DUSL DUSL GEN 2004-10-06 Purchased 621.38152 QUS 410868 2015-01-15 2015-01-15 BK