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  <titleInfo>
    <title>Handbook of thin film process technology</title>
  </titleInfo>
  <titleInfo type="alternative">
    <title>Thin film process technology</title>
  </titleInfo>
  <titleInfo type="uniform">
    <title>98/1 Reactive sputtering</title>
  </titleInfo>
  <titleInfo type="uniform">
    <title>98/2 Recipes for optical materials</title>
  </titleInfo>
  <name type="personal">
    <namePart>Glocker, David A.</namePart>
  </name>
  <name type="personal">
    <namePart>Shah, S. Ismat.</namePart>
  </name>
  <name type="personal">
    <namePart>Westwood, William D. (William Dickson)</namePart>
    <namePart type="date">1937-</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">enk</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Bristol, UK</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Philadelphia</placeTerm>
    </place>
    <publisher>Institute of Physics</publisher>
    <dateIssued>c1995</dateIssued>
    <dateIssued encoding="marc">1995</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xvii, 1 v. (various pagings) : ill. ; 31 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">ed. by David A. Glocker and  S. Ismat Shah.</note>
  <note>Accompanied by: Supplement 98/1, Reactive sputtering / guest editor, William D. Westwood (1 v. (various pagings) : ill. ; 30 cm.)  Bristol ; Philadelphia : The Institute, [c1998].  Call number: TA418.9.T45 H36 1995 Suppl. 98/1</note>
  <note>Accompanied by : Supplement 98/2, Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah (1 v. (various pagings) : ill. ; 31 cm.)  Bristol ; Philadelphia : The Institute, [c1998].  Call number: TA418.9.T45 H36 1995 Suppl. 98/2</note>
  <note>Includes bibliographical references and indexes.</note>
  <subject authority="lcsh">
    <topic>Thin films</topic>
    <topic>Handbooks, manuals, etc</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Surfaces (Technology)</topic>
    <topic>Handbooks, manuals, etc</topic>
  </subject>
  <classification authority="lcc">TA418.9.T45 H36 1995</classification>
  <classification authority="ddc">621.38152 HAN</classification>
  <identifier type="isbn">0750303115</identifier>
  <identifier type="isbn">0750305290 (98/2 suppl.)</identifier>
  <identifier type="lccn" invalid="yes">95237129</identifier>
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