01862cam a2200385 a 45000010008000000030008000080050017000160080041000330100031000740200015001050200029001200350020001490400039001690420014002080500026002220510038002480510038002860820019003242450092003432460033004352600065004683000051005333650013005845000231005975000249008285040053010776500041011306500052011717000022012237000020012457000052012657300030013177300040013478560089013872101836BD-DhUL20150115144602.0950907s1995    enka     bf   001 0 eng d  a   95237129 z   96119879   a0750303115  a0750305290 (98/2 suppl.)  a(OCoLC)33093216  aUkNcUcUkNcUdViBlbVdDLCdBD-DhUL  alccopycat00aTA418.9.T45bH36 1995  aTA418.9.T45bH36 1995 Suppl. 98/1  aTA418.9.T45bH36 1995 Suppl. 98/200a621.38152bHAN00aHandbook of thin film process technology /ced. by David A. Glocker and  S. Ismat Shah.3 aThin film process technology  aBristol, UK ;aPhiladelphia :bInstitute of Physics,cc1995.  axvii, 1 v. (various pagings) :bill. ;c31 cm.  aGBPb300  aAccompanied by: Supplement 98/1, Reactive sputtering / guest editor, William D. Westwood (1 v. (various pagings) : ill. ; 30 cm.)  Bristol ; Philadelphia : The Institute, [c1998].  Call number: TA418.9.T45 H36 1995 Suppl. 98/1  aAccompanied by : Supplement 98/2, Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah (1 v. (various pagings) : ill. ; 31 cm.)  Bristol ; Philadelphia : The Institute, [c1998].  Call number: TA418.9.T45 H36 1995 Suppl. 98/2  aIncludes bibliographical references and indexes. 0aThin filmsvHandbooks, manuals, etc. 0aSurfaces (Technology)vHandbooks, manuals, etc.1 aGlocker, David A.1 aShah, S. Ismat.1 aWestwood, William D.q(William Dickson),d1937-0 a98/1 Reactive sputtering.0 a98/2 Recipes for optical materials.423Publisher descriptionuhttp://www.loc.gov/catdir/enhancements/fy0713/95237129-d.html