Handbook of thin film process technology - Glocker, David A.; Shah, S. Ismat; Westwood, William D. (William Dickson), 1937- (Bristol, UK ; Philadelphia : Institute of Physics, 1995)
Accompanied by: Supplement 98/1, Reactive sputtering / guest editor, William D. Westwood (1 v. (various pagings) : ill. ; 30 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/1
Accompanied by : Supplement 98/2, Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah (1 v. (various pagings) : ill. ; 31 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/2
Includes bibliographical references and indexes.
Keywords: Thin films -- Handbooks, manuals, etc; Surfaces (Technology) -- Handbooks, manuals, etc