Handbook of thin film process technology / ed. by David A. Glocker and S. Ismat Shah. Thin film process technology 98/1 Reactive sputtering. 98/2 Recipes for optical materials. Glocker, David A. Shah, S. Ismat. Westwood, William D. (William Dickson), 1937- Thin films Handbooks, manuals, etc. Surfaces (Technology) Handbooks, manuals, etc. TA418.9.T45 H36 1995 621.38152 HAN Accompanied by: Supplement 98/1, Reactive sputtering / guest editor, William D. Westwood (1 v. (various pagings) : ill. ; 30 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/1 Accompanied by : Supplement 98/2, Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah (1 v. (various pagings) : ill. ; 31 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/2 Includes bibliographical references and indexes. Bristol, UK ; Philadelphia : Institute of Physics, c1995. c1995. 1995 Text xvii, 1 v. (various pagings) : http://www.loc.gov/catdir/enhancements/fy0713/95237129-d.html eng