@book{31670,
	author = {Glocker, David A.},
	title = {Handbook of thin film process technology /},
	publisher = {Institute of Physics,},
	year = {c1995.},
	address = {Bristol, UK ;},
	note = {Accompanied by: Supplement 98/1, Reactive sputtering / guest editor, William D. Westwood (1 v. (various pagings) : ill. ; 30 cm.)  Bristol ; Philadelphia : The Institute, [c1998].  Call number: TA418.9.T45 H36 1995 Suppl. 98/1},
	url = {http://www.loc.gov/catdir/enhancements/fy0713/95237129-d.html}
}