<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Insulating films on semiconductors 1991</title>
    <subTitle>proceedings from the 7th biennial european conference, including satellite workshops on silicon on insulator: materials and device technology and the physics of hot electron degradation in Si MOSFETs held at the University of Liverpool, 2nd to 6th April 1991</subTitle>
  </titleInfo>
  <name type="conference">
    <namePart>Biennial European Insulating Films On Semiconductors Conference 1991 : Liverpool, England)</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Eccleston, W.</namePart>
  </name>
  <name type="personal">
    <namePart>Uren, M.</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">enk</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Bristol, Philadelphia</placeTerm>
    </place>
    <publisher>Adam Hilger</publisher>
    <dateIssued>c1991</dateIssued>
    <dateIssued encoding="marc">1991</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>x, 344 p. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">Edited by W. Eccleston and M. Uren.</note>
  <note>Includes bibliographical references and index.</note>
  <subject authority="lcsh">
    <topic>Metal oxide semiconductors</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Metal insulator semiconductors</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Electric insulators and insulation</topic>
    <topic>Thin films</topic>
    <topic>Congresses</topic>
  </subject>
  <subject>
    <topic>Properties of materials</topic>
  </subject>
  <subject>
    <topic>Electricity, magnetism and electromagnetism</topic>
  </subject>
  <classification authority="ddc">621.3815 INS</classification>
  <identifier type="isbn">0750301686 (pbk) :</identifier>
  <identifier type="lccn">gb 91089031</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg">UKM</recordContentSource>
    <recordCreationDate encoding="marc">910814</recordCreationDate>
    <recordChangeDate encoding="iso8601">20150115144446.0</recordChangeDate>
    <recordIdentifier source="BD-DhUL">1101544</recordIdentifier>
  </recordInfo>
</mods>
