Handbook of microlithography, micromachining, and microfabrication Microlithography, micromachining, and microfabrication Rai-Choudhury, P. text bibliography wau Bellingham, Wash., USA London, UK SPIE Optical Engineering Press Institution of Electrical Engineers c1997 1997 1997 monographic eng
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2 v. : ill. ; 26 cm. v. 1. Microlithography -- v. 2. Micromachining and microfabrication. P. Rai-Choudhury, editor. Includes bibliographical references and indexes. Microlithography Micromachining Microfabrication TK7836 .H3423 1997 670 476144 IEE materials & devices series ; 12A-12B 0819423785 (v. 1) 0819423793 (v. 2) 96040237 DLC 961204 20150115144445.0 3054225