01359cam a2200337 a 4500 3054225 BD-DhUL 20150115144445.0 961204m19971997waua b 001 0 eng 96040237 0819423785 (v. 1) 0819423793 (v. 2) DLC DLC DLC BD-DhUL TK7836 .H3423 1997 670 21 476144 Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, editor. Microlithography, micromachining, and microfabrication Bellingham, Wash., USA : SPIE Optical Engineering Press ; London, UK : Institution of Electrical Engineers, c1997. 2 v. : ill. ; 26 cm. IEE materials and devices series ; 12A-12B Includes bibliographical references and indexes. v. 1. Microlithography -- v. 2. Micromachining and microfabrication. Microlithography. Micromachining. Microfabrication. Rai-Choudhury, P. IEE materials & devices series ; 12A-12B. 7 cbc orignew 1 ocip 19 y-gencatlg ddc BK pc03 to ja00 12-04-96; JG04 12-09-96; jg12 to tech1; jg11 to jg12; jg12 12-11-96; jg08 12-19-96; CIP ver. pv07 05-19-97 31665 31665 0 0 ddc 0 670_476144000000000 0 NFIC 59692 DUSL DUSL GEN 2012-01-15 670 476144 476144 2015-01-15 2015-01-15 BK