01112cam a2200289 a 45000010008000000030008000080050017000160080041000330100017000740200022000910200022001130400027001350500024001620820020001862450100002062460059003062600123003653000027004884900048005155040053005635050073006166500022006896500020007116500022007317000022007538300047007753054225BD-DhUL20150115144445.0961204m19971997waua     b    001 0 eng    a   96040237   a0819423785 (v. 1)  a0819423793 (v. 2)  aDLCcDLCdDLCdBD-DhUL00aTK7836b.H3423 199700a670221b47614400aHandbook of microlithography, micromachining, and microfabrication /cP. Rai-Choudhury, editor.30aMicrolithography, micromachining, and microfabrication  aBellingham, Wash., USA :bSPIE Optical Engineering Press ;aLondon, UK :bInstitution of Electrical Engineers,cc1997.  a2 v. :bill. ;c26 cm.1 aIEE materials and devices series ;v12A-12B  aIncludes bibliographical references and indexes.0 av. 1. Microlithography -- v. 2. Micromachining and microfabrication. 0aMicrolithography. 0aMicromachining. 0aMicrofabrication.2 aRai-Choudhury, P. 0aIEE materials & devices series ;v12A-12B.