Handbook of microlithography, micromachining, and microfabrication - Rai-Choudhury, P. (Bellingham, Wash., USA : SPIE Optical Engineering Press ; London, UK : Institution of Electrical Engineers, 1997)
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
Includes bibliographical references and indexes.
Keywords: Microlithography; Micromachining; Microfabrication