@book{31665,
	author = {Rai-Choudhury, P.},
	title = {Handbook of microlithography, micromachining, and microfabrication /},
	publisher = {SPIE Optical Engineering Press ;},
	year = {c1997.},
	series = {IEE materials and devices series ;},
	address = {Bellingham, Wash., USA :}
}