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  <titleInfo>
    <title>Semiconductor material and device characterization</title>
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  <name type="personal">
    <namePart>Schroder, Dieter K.</namePart>
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    <publisher>Wiley</publisher>
    <dateIssued>c2006</dateIssued>
    <dateIssued encoding="marc">2006</dateIssued>
    <edition>3rd ed.</edition>
    <issuance>monographic</issuance>
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    <extent>xv, 779 p. : ill. ; 24 cm.</extent>
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  <note type="statement of responsibility">Dieter K. Schroder.</note>
  <note>"Wiley-Interscience."</note>
  <note>Includes bibliographical references and index.</note>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Testing</topic>
  </subject>
  <classification authority="lcc">QC611 .S335 2006</classification>
  <classification authority="ddc">621.38152 SCS</classification>
  <identifier type="isbn">0471739065 (acidfree paper)</identifier>
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