@book{31506,
	author = {Ghandhi, Sorab Khushro,},
	title = {VLSI fabrication principles :},
	publisher = {Wiley,},
	year = {c1994.},
	address = {New York :},
	edition = {2nd ed.},
	note = {"A Wiley-Interscience publication."},
	url = {http://www.loc.gov/catdir/description/wiley037/93040716.html}
}