TY  - BOOK
AU  - Veronis, Andrew.
TI  - Integrated circuit fabrication technology
SN  - 0835930920
AV  - TK7874 .V47
U1  - 621.38173 
PY  - 1979///
CY  - Reston, Va.
PB  - Reston Pub. Co.
KW  - Integrated circuits
N1  - Includes index
ER  -